鄭雲謙 Yun-Chien Cheng
國立臺灣大學電機工程學系 教授
Professor, Department of Electrical Engineering, National Taiwan University
主要研究領域:
電漿半導體製程，電漿醫學Major Research Areas:
Plasma semiconductor, plasma medicine研究領域摘要:
Research Summary:
Etching & Polishing
- Design new RIE-ICP chamber for homogeneous wafer etching and electron-assisted atomic removal
- Multi-physics simulation (plasma discharge + flow + PIC models) to guide chamber parameters
Plasma medicine
Plasma for cancer therapy, wound healing, biocoating, and transdermal drug delivery
Plasma AI
Plasma-Assisted Polishing (PAP)
- APPJ used to functionalize diamond surfaces via –OH/–O terminal generation; studying C-atom removal mechanisms at atomic-layer precision
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B.S.
EE, National Taiwan University, 2004 -
M.S.
EE, National Taiwan University, 2006 -
Eng.D.
Darmstadt Uni. of Tech. / German Cancer Research Center, 2012
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Address
MD-721,
Department of Electrical Engineering,
National Taiwan University,
Taipei 106, Taiwan -
Phone
+886-2-33669755 -
Email:
