Dr. Tsai's main research theme is the design and application of advanced control, simulation, signal processing, optimization, and machine learning techniques to solve nanolithography and general nanotechnology related problems, with a current focus on the design and fabrication techniques of exploratory nanoscale integrated circuits at the ITRS 10 nm half-pitch node (aka "5 nm node") and beyond. He also has research activities on control system design automation, biomedical equipment design, automotive electronics, and consumer electronics such as audio-visual systems. His research group at the Nanoscale Design and Fabrication Systems Lab (NDFSL), Particle Beam Precision Patterning and Imaging Lab (PBPPIL), and High-Performance Servo Systems Lab (HPSSL) has been studying topics including, e.g.,
(1) Nanolithography processes and equipment: Next-generation lithography (NGL) based on multiple-charged-particle-beam-direct-write (MCPBDW), extreme ultraviolet (EUV) light, and directed self-assembly (DSA); Ion beam imaging and patterning. (2) Nanolithography software: Lithography/etching simulation, model calibration, and resolution enhancement techniques (RETs); Design for manufacturability (DFM); Charged-particle optics design optimization. (3) Nanolithography process and equipment control: Advanced process control (APC), advanced equipment control (AEC), and fault detection/classification (FDC); High-accuracy alignment and overlay algorithms; Optimal lens adjustment. (4) Circuit design automation by control and optimization techniques: Analysis and design of actuation/sensor/power circuits; Automatic circuit/layout generation and optimization. (5) Sensor/actuator array systems, signal processing, and real-time control: Electron-beam position monitor system based on MEMS and sensor fusion technologies. Mixed-signal circuit design for laser interferometers. High-performance motion systems, e.g. micro laser scanning mirrors. Laser speckle reduction. ADAS sensor analysis and robustness evaluation. (6) Automotive electronic systems: Permanent magnet synchronous motor control system analysis and design for mild hybrid vehicles. Active/semi-active suspension systems. (7) Design and control of UAV systems.
Dr. Tsai is open to establishment of new research topics based on student interests and industry demands.
Teaching Control Systems (2019 Spr.), Digital Control Systems (2020 Spr.), System Identification (2020 Aut.), Nonlinear/Convex Optimization (2019 Aut.), VLSI Design for Manufacturability
"Introduction to Lithography for Nanometer VLSI Manufacturing" (2006/12/21 at NTHU CS dept. and 2007/03/09 at EDA Forum in Taiwan)
"NGL Research Activities at NTU" (2006/12/12 EVU Workshop at NSRRC, Taiwan)
"From Control to Nanofabrication -- A System Engineer's Vision" (2004/03/24 at NTU EE dept.)
How William Shockley's Robot Dream Helped Launch Silicon Valley, IEEE Spectrum, 2013
Trailblazers in Solid-State Electronics, IEEE Industrial Electronics Magazine, IEEE 5(4), pp. 46-47, 2011
Ms. Yi-Ru Chen, Adminstrative Research Assistant. firstname.lastname@example.org +886-2-33669638
Mr. Sheng-Wei Chien, Senior Technology Research Specialist. email@example.com +886-2-33663704
Mr. Jia-Syun Cai, Technology Research Specialist. firstname.lastname@example.org +886-2-33669679
Funding info. for prospective graduate students Full-time graduate students are adequately supported regardless of research topic(s) chosen.
Positions One Postdoctoral Researcher position is currently open.